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Water Vapor Generator

WVG2SLM Series Representative Product No.：WVG2SLM

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Water Vapor Generator

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Mass Flow Controllers

FCSDS-T2000 Series Representative Product No.：FCSDS-T2000

Max Pressure (MPa)：0.133 Max Temperature(℃)：50　Min Temperature(℃)：5 Feature： Minute Adjustments Possible

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Mass Flow Controllers

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Auto Pressure Controllers

UPC Series Representative Product No.：UPC

Material：Stainless Steel (SUS316L),Ni-Co Alloy Max Pressure (MPa)：0.2 Max Temperature(℃)：50　Min Temperature(℃)：0

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Auto Pressure Controllers

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Mass Flow Controllers

FCS-G200 Series Representative Product No.：FCS-G200

Max Pressure (MPa)：0.3 Max Temperature(℃)：50　Min Temperature(℃)：5 Feature： Minute Adjustments Possible

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Mass Flow Controllers

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Mass Flow Controllers

FCS-T2000 Series Representative Product No.：FCS-T2000

Max Pressure (MPa)：0.3 Max Temperature(℃)：50　Min Temperature(℃)：5 Feature： Minute Adjustments Possible

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Mass Flow Controllers

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Mass Flow Controllers

FSC-G300 Series Representative Product No.：FSC-G300

Max Pressure (MPa)：0.3 Max Temperature(℃)：50　Min Temperature(℃)：5 Feature： Minute Adjustments Possible

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Mass Flow Controllers

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Mass Flow Controllers

FCS-T1000MP Series Representative Product No.：FCS-T1000MP

Max Pressure (MPa)：0.4 Max Temperature(℃)：50　Min Temperature(℃)：5 Feature： Minute Adjustments Possible

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Mass Flow Controllers

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Mass Flow Controllers

FCS-T1000Z Series Representative Product No.：FCS-T1000Z

Max Pressure (MPa)：0.4 Max Temperature(℃)：50　Min Temperature(℃)：5 Feature： Minute Adjustments Possible

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Mass Flow Controllers

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Mass Flow Controllers

FCS-T1000F Series Representative Product No.：FCS-T1000F

Max Pressure (MPa)：0.4 Max Temperature(℃)：50　Min Temperature(℃)：5 Feature： Minute Adjustments Possible

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Mass Flow Controllers

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Mass Flow Controllers

FCS-T1000M(Z)F-HT Series Representative Product No.：FCS-T1000M(Z)F-HT

Max Pressure (MPa)：0.4 Max Temperature(℃)：80　Min Temperature(℃)：50 Feature： Minute Adjustments Possible

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Mass Flow Controllers

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Mass Flow Controllers

FCS-T1000L Series Representative Product No.：FCS-T1000L

Max Pressure (MPa)：0.4 Max Temperature(℃)：50　Min Temperature(℃)：5 Feature： Minute Adjustments Possible

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Mass Flow Controllers

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Auto Pressure Controllers

PCS-T1000F Series Representative Product No.：PCS-T1000F

Max Pressure (MPa)：0.4 Max Temperature(℃)：50　Min Temperature(℃)：5

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Auto Pressure Controllers

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Mass Flow Meter with Integrated Indicator

FCS-TM39 Series Representative Product No.：FCS-TM39

Max Pressure (MPa)：0.5 Max Temperature(℃)：50　Min Temperature(℃)：0 Feature： Minute Adjustments Possible

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Mass Flow Meter with Integrated Indicator

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Mass Flow Controllers

FCS-T1200F Series Representative Product No.：FCS-T1200F

Max Pressure (MPa)：0.7 Max Temperature(℃)：45　Min Temperature(℃)：5 Feature： Minute Adjustments Possible

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Mass Flow Controllers

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Mass Flow Controllers

FCS-T1500F Series Representative Product No.：FCS-T1500F

Max Pressure (MPa)：0.7 Max Temperature(℃)：45　Min Temperature(℃)：5 Feature： Minute Adjustments Possible

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Mass Flow Controllers

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Mass Flow Controllers

FCS-T1200MF-HT Series Representative Product No.：FCS-T1200MF-HT

Max Pressure (MPa)：0.7 Max Temperature(℃)：80　Min Temperature(℃)：50 Feature： Minute Adjustments Possible

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Mass Flow Controllers

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Flow Control Systems

FCSP8000 Series Representative Product No.：FCSP8000

Material：Stainless Steel (SUS316L), Super-Ferritic, Nickel-Cobalt Alloy Max Pressure (MPa)：0.89 Max Temperature(℃)：50　Min Temperature(℃)：0 Feature： Special Material Gas,Minute Adjustments Possible

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Flow Control Systems

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Flow Control Systems

FCSP7000 Series Representative Product No.：FCSP7000

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Flow Control Systems

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Flow Control Systems

FCSP7000W Series Representative Product No.：FCSP7000W

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Flow Control Systems

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Integrated Gas Systems

1.125W Series Representative Product No.：1.125W

Series Outline：
Basic concept of IGS
① Improve performance of basic technology
② Make compact
③ Improve reliability
　　Uses Wseal (Separates the part that receives external force and the seal)
④ Improve workability and maintenance
　　Parts can be attached and detached from the surface
　　Leak port, dedicated tool
⑤ Promotes standardization
⑥ Reduces cost

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Integrated Gas Systems

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