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Periodic maintenance is directly performed on-site by our experienced staff.
Maintenance case example for company A
- Regular inspection of equipment every year
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Inspection items
- 1)Disassembly / inspection
- 2)Restoration / cleaning
- 3)Exchange parts
- 4)Assemble / install piping
- 5)Adjust / inspect / check results
- 6)Create report
1)Disassembly / Inspection
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Location: Work room (left), clean room (right), inspection
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Disassembly / Inspection
Location: Clean room
Situation: Damage is discovered on the exit seat of the body. Lapping is performed.
Lapping procedure: Several times with 800, then finished several times with 2000.
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2)Restoration / Cleaning
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Location: Clean room
Situation: Parts cleaning
Cleaning fluid: Approximately 150cc of IPA and acetone are used for rough cleaning, and 200cc of alternative CFCs is used.
3)Exchange parts
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Location: Clean room
Replace parts (new parts) <according to the usable parts list>
4)Assemble / Install Piping
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After assembly, piping is installed
5)Adjust / Inspect / Check Results
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Aperture, limit adjustment and confirm operation
External (airtight) leak inspection
Pressure of 26MPa / liquid nitrogen gas
Maintain for 10 minutes and check for leaks
Inspection passed
6)Create Report
After completing the work, we will create not only a work report, but also an inspection report with the maintenance results. Please instruct the staff at the time of maintenance.