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Monodzukuri Nippon Grand Award Awarded Products

The Prime Minister Award "Monodzukuri Nippon Grand Award" is given to those who are recognized as particularly excellent among the talent of each generation engaged in "manufacturing", and to middle-level talented persons who are at the core of manufacturing and production sites, skilled people who have supported traditional and cultural "techniques", young talented persons who will be responsible for the future. This is given in order to supports the growth of Japan's industry and culture, and steadily succeed "manufacturing" which has greatly contributed to the formation of a rich living of the people, and further develop "manufacturing".

Fujikin Advanced Liquid Vaporizing System（FALVS®）

2017, 7th Monodzukuri Nippon Grand Award, awarded by the Minister of Economy, Trade and Industry (Products・Technology Development Department awarded)

Seven developers of the Fujikin Advanced Liquid Vaporizing System (2017, 7th Monodzukuri Nippon Grand Award, awarded to the Products・Technology Development Department by the Minister of Economy, Trade and Industry) developed the world's first system for the semiconductor film forming process that can directly vaporize liquid metal organics without a carrier gas such as helium (He), precisely control pressure fluctuations, and supply a fixed amount on the silicon wafer to form the film. Compared to conventional systems which are diluted with carrier gases, productivity is greatly improved (large flow rate with 100% concentration, operation costs reduction, process time reduction, system miniaturization), and the wafer has a larger diameter with higher integration of circuits, which contributes to the next generation of semiconductor manufacturing.

Fujikin Advanced Liquid Vaporizing System（FALVS®）

Stable integrated ultra-pure gas supply system for semiconductor manufacturing

2005, 1st Monodzukuri Nippon Grand Award

9 developers from Fujikin's Product・Technology Development Division were awarded the Prime Minister's Commendation "1st Monodzukuri Nippon Grand Award," by the Minister of Economy, Trade and Industry, which was newly established by the government in 2005. This award is aimed at individuals or groups who have overcome advanced technical problems to develop and implement revolutionary products, components, and industry technology that has not been available up to now, and Fujikin's excellent technical development was recognized. Thank you to everyone for your warm support.

Stable integrated ultra-pure gas supply system for semiconductor manufacturing
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