Electronics > Systems
- Utility・Terms:
- Semiconductor Manufacturing
- FPD Manufacturing
- Solar Battery Manufacturing
- LED Manufacturing
- Washing Equipment
- Etching Equipment
- CVD Equipment
- Sputtering Equipment
- Ion Implantation Systems
- Vacuum Deposition Equipment
- Ashing Equipment
- Annealing Equipment
- Vacuum Furnaces
- High Durability
- High Vacuum Compatibility
- High Cleanliness
- Compact
- Specialty Gas Compatibility
- High Purity Materials
- High Airtightness
Equipment Name
Flow Control Systems (FCS®)
Mass Flow Controllers
Integrated Gas Systems (IGS®)
Water Vapor Generator